Objectives of the Lab:
Semiconductor research Centre (SRC) at Punjab Engineering College (Deemed to be University), Chandigarh is a state-of-the-art facility for the semiconducting material growth, micro-/nano-electronic device design, fabrication and their electrical (DC and RF) characterization. It comprises of 4 clean room laboratories having an area of 1300 sq. feet, of Class 1000 and 10000, dedicated for the chemical processing of semiconductors, material growth/deposition, lithography with a minimum feature size of 1.0 µm and electrical testing up to 20 GHz. The cleanroom facilities are supported by high end computing and simulation facility called Nano electronics Research Lab (NRL) at ECE Dept.
| Sr. No. | Name of Equipment | Image | Brief Description (key feature) of each Equipment |
|---|---|---|---|
| 1. | Plasma enhanced chemical vapor deposition |  |
Wise variety of material growth including high-k dielectric,, 4” substrate holder with heating upto 3000C, fully automatic operation control using HMI |
| 2. | E beam evaporation |  |
6” substrate holder, ultimate vacuum of 5x1017 Torr within 90 minutes, electron beam gun with four pockets, can evaporate high melting point materials such as Mo, W, source holder capable of accommodating spirals, helix types or boats |
| 3. | Mask Aligner and exposure |  |
Ability to do patterning/lithography with semi-automatic capability, minimum feature size of 0.8µm, can handle substrates up to 3 inch diameter |
| 4. | Spin Coater |  |
Navson, 2020 Maximum rotational speed 12000 rpm, can store up to 30 recipes in internal memory with unlimited storage via USB |
| 5. | Reactive Ion Etching |  |
Hind Hivac Vacuum (HHV), 2020 Capable of handling wafers up to 4” dia, utilizes RF power of 600 watts at frequency 13.56 MHz with dark space shield to avoid parasitic plasma, option to select different gases |
| 6. | Probe Station with SMU’s |  |
Keysight Technologies, 2020 Stereo zoom microscope with adjustable eyepiece 20X (pair) having zoom from 13X~90X, Low noise shield 4 inch chuck with substrate vacuum, Six manipulators with magnetic bases capable of moving X, Y, Z directions |
| 7. | Microwave integrated circuit/PCB prototype |  |
Fully automated operation with highest resolution (0.5µm) and repeatability (±0.001 mm). Suitable for multilayer and RF (FR4 18/18 Cu) material. Can achieve PCB track widths up to 100µm. 2.5 dimensional operation with Z axis control. Automatic 15 position tool changer; automatic milling width adjustment. Pneumatic non-contact working depth limiter |
| 8. | Wet Benches for Wafer Cleaning and Wet Etching |  |
Axenic Systems, Equipped with HEPA filter and sash to protect from chemical fumes and splashes, for wet chemical processing for cleaning, etching, comprises of supporting equipment like ultrasonic cleaner, hot plates, magnetic stirrer |
| 9. | Spectrum Analyzer |  |
Keysight Technologies, 2020, Frequency up to 20 GHz, zero span, 100Hz to maximum frequency |
| 10. | Impedance Analyzer (keysight) |  |
Frequency up to 20 MHz with 1 mHz resolution. Can measure Impedance(Z), Phase angle, Capacitance, Dissipation Factor (D), Inductance(L), Quality factor (Q), Resistance(R), Conductance(G), Reactance (X), Susceptance (G), Admittance(Y) |
| 11. | Digital Storage Oscilloscope |  |
Keysight Technologies, 2020, 4 fully isolated and floating channel with external trigger, 200 MHz bandwidth with sampling rate of 2 GSa/s, input coupling of DC, AC, GND |
| 12. | Digital Precision Multimeter 6.5 digit |  |
Keysight 24401A, 10 measurement functions: DC/AC voltage, DC/AC current, 4-wire resistance, diode, frequency period, 1000V max voltage input, 3 A max input current |
| 13. | Function generator |  |
Single Channel Frequency ranges VOUT ≤ 10 Vpp; 1 µHz to 30 MHz, 1- µHz resolution |
| 14. | Precision Source Measuring unit (01) |  |
Keysight B2902A, Dual channel with capability to source and measure both voltage and current , Minimum source resolution: 1pA/1µV, maximum output: 210 V, 3 A DC/10.5A pulse |
| 15. | Vector Network Analyzer (VNA) |  |
Keysight M9005A, Frequency range: 500kHz to 20 GHz with resolution of 6 Hz or less, Output power and power sweep range: - 40dBm to +6dBm upto GHz |
Name of officials handling the laboratory:
| Prof. Arun Kumar Singh (PI) Head & Professor, Dept. of ECE PEC, Chandigarh |
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| Dr. Deepak Kumar Sharma (Joint O/I) Assistant Professor, Dept. of ECE PEC, Chandigarh |
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| Dr. Devender Pal Singh (Joint O/I lab) Assistant Professor, Dept. of ECE PEC, Chandigarh |
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| Mr. Vivek Sood Technician, Dept. of ECE PEC, Chandigarh |
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| Mr. Ram Dev Lab Assistant, Dept. of ECE, PEC, Chandigarh |
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