Probe Station (Ecopia EPS300)

February 20, 2023
Name of the Equipment
Probe Station (Ecopia EPS300)
Equipment Image
Probe Station (Ecopia EPS300)
Faculty Incharge

Dr. Arun Kumar Singh

Description

Stereo-zoom microscope with adjustable Eyepiece 20X (pair) with 13X-90X and zoom optics 0.67X -4.5X. Low noise shield 4 inch chuck with substrate vacuum Six manipulators with Magnetic bases capable of moving X, Y, and Z direction

Location
Semiconductor Research Centre
Status of Equipment
Working
Purchased from Institute fund/ Project grant/ others
DST-SERB Project
Department
Electronics & Communication Engineering