Name of the Equipment
Electron beam/thermal Evaporator (Hind High Vacuum Make)
Equipment Image
Faculty Incharge
Dr. Arun Kumar Singh
Description
Up to 6” Substrate holder. Ultimate vacuum of 5x10-7 Torr within 90 minutes. Electron Beam Gun with four pockets Can evaporate high melting point materials such as Mo and W Digital thickness monitor with ON/OFF operation for the deposition
Location
Semiconductor Research Centre
Status of Equipment
Working
Purchased from Institute fund/ Project grant/ others
DST-SERB Project
Department
Electronics & Communication Engineering