6 |
Deepak K. Sharma, J John, G. Supriya, Ashwini Jambhalikar, M. S. Giridhar “Process Development for Very Deep etching of Silicon using Two Layer Masks for Fabrication of Mechanically Decoupled MEMS Gyroscope” in IEEE VLSI Design and Test (VDAT), 2021 |
7 |
Deepak K. Sharma, Gogulapati Supriya, Ashwini Jambhalikar, M.S. Giridhar, J. John, Ajith Kumar S and K V Sriram “MEMS based Detection and Analysis Lab (MEDAL)” presented at ISRO Headquarters during Indian Space Technology, DTDI Vision-2030, 2020 |
8 |
M..S. Giridhar, Deepak K. Sharma et. al. “Testing and qualification of RF MEMS switch demonstrator payload (RFMEMS-TD-1) for small satellite platform” 2nd National Conference on Small Satellite Technology and Applications, 2020 |
9 |
Hriday Datha, Deepak K. Sharma et. al. “Experimental Investigation of MEMS based Micro Heat Pipe With Infra Red Camera” ISSS National Conference on Micro and Smart Systems (ISSS) held at Nitte Mahalinga Adyanthaya Memorial Institute of Technology (NMAMIT), Mangalore, Karnataka, 2019 |
10 |
Deepak K. Sharma, Robin Khosla and Satinder K. Sharma “Reliability evaluation of erbium oxide thin films as a gate dielectric for CMOS technology” Proceedings of the International Conference On: Multifunctional Materials, Structures and Applications (ICMMSA), 2014 |